[16p-315-1~11] GFIS（電界電離ガスイオン源）ガスイオン顕微鏡技術とその材料・デバイス研究開発への応用：現状と今後の展望

▲ [16p-315-4] A study on fabrication characteristics of gold films using focused helium ion beam

〇前田 悦男¹、飯島 智彦²、右田 真司²、小川 真一²、米谷 玲皇¹ (1.東大工、2.産総研)

キーワード：helium ion microscope, ion beam, nanoscale patterning

The nano-gap fabrication techniques with gold structures have been investigated to realize the high efficient sensing devices. In our work, the helium ion microscope (HIM, Carl Zeiss ORION PLUS at AIST SCR station) was carried out to realize nanoscale patterning. For the purpose of detailed study for fabrication characteristics of gold films using HIM, cross-section of etched trench were evaluated by Z-contrast TEM images.