5:00 PM - 5:15 PM
[16p-411-5] Oblique angle deposition of the Pb (Zr, Ti) O3 thin film and the characteristic evaluation
Keywords:thin film, piezoelectric, PZT
Presentation information
Oral presentation
6 Thin Films and Surfaces » 6.1 Ferroelectric thin films
[16p-411-1~10] 6.1 Ferroelectric thin films
6.1と13.3と13.5のコードシェアセッションあり
Thu. Mar 16, 2017 4:00 PM - 6:30 PM 411 (411)
Tomoaki Yamada(Nagoya Univ.)