The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Keiji Ikeda(TOSHIBA), Masaharu Kobayashi(Univ. of Tokyo)

5:15 PM - 5:30 PM

[16p-412-16] Structural change and thermal transport properties of Al2O3 film on Ge substrate

Yuta Nakajima1,2, Hiroki Fujishiro1, Sachie Fujikawa1, Tatsurou Maeda1,2, Junichi Hattori2, Kouichi Fukuda2, Noriyuki Uchida2 (1.Tokyo University of Sience, 2.AIST)

Keywords:semiconductor, thermal transport properties, germanium