The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Toshifumi Irisawa(AIST), Shinichi Takagi(Univ.Tokyo)

3:15 PM - 3:30 PM

▼ [16p-413-6] Atomic exchange between Ge and Si at GeO2/Si interface

〇(D)Woojin Song1, Akira Toriumi1 (1.The Univ. Tokyo)

Keywords:SiGe, Site exchange, Ge Reduction