2:45 PM - 3:15 PM
[16p-501-3] Development of TMR Sensor and Its Application to Bio-Magnetic Field Measurement
Keywords:magnetic field sensor, tunnel magnetoresistance, bio-magnetic field
We have developed a biomagnetic field measurement sensor at room temperature using a ferromagnetic tunnel junction. Magnetic tunnel junction (MTJ) was microfabricated in series and parallel in order to reduce the device noise and a magnetic field sensor module incorporating various circuits such as a bridge, an amplifier, a filter, etc. for improving the S / N ratio was fabricated. Using this module, cardiac magnetic field was successfully measured. In addition, by canceling the environmental noise using two sensor probes, it was shown that the signal can be detected even outside the magnetic shield. In this symposium, I present detailed characteristics of this sensor, necessary technical problems for biomagnetic field detection, and possibility of future development.