The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.7 Biomedical Engineering and Biochips

[16p-F205-1~18] 12.7 Biomedical Engineering and Biochips

Thu. Mar 16, 2017 1:45 PM - 6:45 PM F205 (F205)

Shigeyasu Uno(Ritsumeikan Univ.), Hideaki Yamamoto(東北大), Yoshiaki Ukita(Univ. of Yamanashi), Keiko Tawa(関西学院大)

4:30 PM - 4:45 PM

[16p-F205-11] Fabrication of MEMS optical interferometric surface-stress sensor with high wavelength selectivity for label-free biosensing

Toshiaki Takahashi1, Takeshi Hizawa1, Nobuo Misawa2, Miki Taki1, Kazuaki Sawada1, Kazuhiro Takahashi1,3 (1.Toyohashi Tech., 2.KAST, 3.JST-PRESTO)

Keywords:biosensor, Fabry-Perot interferometer, wavelength selectivity

We developed a MEMS Fabry-Perot interferometer with high wavelength selectivity by using Au half-mirrors for a highly sensitive label-free biosensor. By integrating 50-nm-thick Au half-mirrors, wavelength selectivity improved to be 5.2 times and we successfully demonstrated spectral shift of 40 nm caused by membrane deflection due to the immobilization of anti-BSA antibody on the optical interferometric sensor.