[16p-F205-1~18] 12.7 Biomedical Engineering and Biochips

△ [16p-F205-11] Fabrication of MEMS optical interferometric surface-stress sensor with high wavelength selectivity for label-free biosensing

〇Toshiaki Takahashi¹, Takeshi Hizawa¹, Nobuo Misawa², Miki Taki¹, Kazuaki Sawada¹, Kazuhiro Takahashi^1,3 (1.Toyohashi Tech., 2.KAST, 3.JST-PRESTO)

Keywords:biosensor, Fabry-Perot interferometer, wavelength selectivity

We developed a MEMS Fabry-Perot interferometer with high wavelength selectivity by using Au half-mirrors for a highly sensitive label-free biosensor. By integrating 50-nm-thick Au half-mirrors, wavelength selectivity improved to be 5.2 times and we successfully demonstrated spectral shift of 40 nm caused by membrane deflection due to the immobilization of anti-BSA antibody on the optical interferometric sensor.