[16p-P13-1~21] 3.12 Nanoscale optical science and near-field optics

[16p-P13-13] Evaluation of a Plasmonic Lens for Subwavelength Beam Focusing in UV region

〇Akihiro Tsuchiyama¹, Yusuke Miura¹, Minoru Takeda¹, Tsutomu Inoue², Kento Aizawa² (1.Kyoto Institute of Technology, 2.JASCO Corporation)

Keywords:plasmonics

We designed a plasmonic lens utilizing surface plasmon for ultraviolet wavelength, with multi-circular slit apertures in Al thin film. Slit apertures are milled using a focused ion beam system, in Al film on a fused-silica glass substrate, and we measured and evaluated the focusing characteristics of the plasmonic lens using near-field scanning optical microscopy, with diode laser of 375 nm wavelength. We confirmed that a focal spot their full width at half maximum is about 270 nm at the focal length of 2.2 µm were experimentally attained. At the meeting, we will report comparison of these measurement results and FDTD simulation.