[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-12] Microstructure of a dome-like hillock formed in a CVD homoepitaxial diamond film

〇Nobuteru Tsubouchi¹, Masahiko Ogura¹, Mokuno Yoshiaki¹, Makino Toshiharu¹ (1.AIST)

Keywords:diamond, hillock

Surface morphologies and microstructures of a dome-like hillock typically appearing during the growth of MWCVD homoepitaxial diamond film were investigated using optical microscopy and transmission microscope. In the microscope image, the contrasts of many black thin lines were observed, suggesting the presence of high-density dislocations. The diffraction image inside the hillock was a spotty pattern corresponding to one diamond single crystal domain, being the same as that of the film and substrate.