[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-16] Characterization of deep defects in homoepitaxially grown boron-doped diamond films using transient photocapacitance method

〇Taishi Kodama¹, Maida Osamu¹, Ito Toshimichi¹ (1.Osaka Univ.)

Keywords:diamond, Photocapacitance