[16p-P7-1~36] 13.9 Optical properties and light-emitting devices

[16p-P7-30] Preparation of organic thin films using new compact evaporation source

〇Satoru Kubota¹, Hiroko Kominami², Kazuhiko Hara², YouiChiro Nakanishi², Shouzou Matsumato³, Shoichi Aoshima³ (1.Grad.school of Integrated S & T , Shizuoka Univ., 2.Res.Inst.of Electron., Shizuoka Univ., 3.ALS Technology)

Keywords:Thin Film Preparation, Evaporation source

The aim of this study is development of evaporation source which is compact , low power and high stability. This report is examination of compact quartz cell evaporation source adopting the theory of resistance heating method. Possibility of controling film thickness is found.