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▲ [17a-211-2] Formation of nanocrystalline silicon thin-films through magnesiothermic reduction of quartz-substrates
Keywords:Magnesiothermic reduction, nanocrystalline silicon, SiO2
We have applied a simple methof for the formation of nanocrystalline silicon (nc-Si) thin-films through magnesiothermic reduction of quartz (SiO2)-substrates, which involves sputtering of magnesium thin-films on the quartz-substrates, and subsequent annealing at high temperature of 700OC. An asymmetric Raman-peak at ~507 cm-1 was seen for the reduced Si-film on the quartz-substrate. Fitting of the Raman spectra hows Gaussian-deconvolution of the two peaks centered around ~ 480 cm-1, and 506 cm-1, respectively. Peak at 506 cm-1 roughly suggests formation of nc-Si with evolution of small amorphous phase at 480cm-1. Optical and structural properties were discussed for the nc-Si thin films.