The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[17a-301-1~12] 15.6 Group IV Compound Semiconductors (SiC)

Fri. Mar 17, 2017 9:00 AM - 12:15 PM 301 (301)

Mitsuru Sometani(AIST)

11:15 AM - 11:30 AM

[17a-301-9] Improvement of I-V characteristics by annealing of the oxide films on SiC (000-1) thermally grown in H2O ambient

〇(M1)Nozomu Iitsuka1, Ryu Hasunuma1, Kikuo Yamabe1 (1.Tsukuba Univ.)

Keywords:SiC, insulator