[17a-411-1~11] 6.1 Ferroelectric thin films

[17a-411-11] Simultaneous Water-lift-off patterning of Pb(Zr,Ti)O₃ thick film capacitors

Shunta Higashiura¹, 〇Akiharu Morimoto¹ (1.Kanazawa Univ.)

Keywords:ferroelectric thin films, simultaneous water-lift-off

Ferroelectric Pb(Zr,Ti)O₃(PZT) thick film and Pt top electrode thin film were deposited by pulsed laser deposition (PLD) method. The PZT thick film and Pt thin film were simultaneously patterned by water-lift-off technique using amorphous CaO layer deposited also by PLD method. As a result, excellent ferroelectric properties were obtained successfully. This result indicates that water soaking employed in the lift-off process does not affect the ferroelectric properties of PZT thick film.