[17a-502-1~10] 21.1 Joint Session K

[17a-502-9] Development of high hydrogen-sensitive thermal desorption spectroscopy system
- Application to quantitative analysis of low hydrogen-concentration in oxide semiconductor thin films -

〇(PC)Taku Hanna¹, Hidenori Hiramatsu^1,2, Isao sakaguchi³, Hideo Hosono^1,2 (1.MCES, Tokyo Tech, 2.MSL, Tokyo Tech, 3.NIMS)

Keywords:Hydrogen impurity, oxide semiconductor, quantitative analysis