The 64th JSAP Spring Meeting, 2017

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15 Crystal Engineering » 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[17a-B5-1~12] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

Fri. Mar 17, 2017 9:00 AM - 12:30 PM B5 (B5)

Hidetoshi Suzuki(Miyazaki Univ.)

9:30 AM - 9:45 AM

[17a-B5-3] Corrugation reduction of a periodically inverted AlGaAs waveguide by introducing CMP process

〇Takashi Matsumoto1, Tomonori Matsushita1,2, Takashi Kondo1,2 (1.School of Engineering, 2.RCAST, Univ. of Tokyo)

Keywords:AlGaAs