[17a-F206-1~12] 12.6 Nanobiotechnology

[17a-F206-9] Optimization of edge structures of micro-apertures fabricated in semiconductor silicon chips for formation of stable artificial bilayer lipid membranes

〇Daisuke Tadaki¹, Ayumi Hirano-Iwata^1,2, Daichi Yamaura¹, Shun Araki¹, Miyu Yoshida¹, Kohei Arata¹, Takeshi Ohori¹, Hideaki Yamamoto³, Michio Niwano¹ (1.RIEC, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.FRIS, Tohoku Univ.)

Keywords:bilayer lipid membranes, semiconductor silicon chips, semiconductor microfabrication technology

Artificially reconstituted bilayer lipid membranes (BLMs) in which ion channel proteins are incorporated can function as highly sensitive bio-sensors. In previous work, although the fabrication yield was insufficient, we succeeded in BLM formation with high mechanical and static stabilities by using fabricated micro-apertures that had tapered nano-edge structures in semiconductor silicon chips as supporting materials. In this study, the yield of fabrication chips was improved and optimization of edge structures was examined by comparing stability of BLM formed in some different types of the fabricated edges.