The 64th JSAP Spring Meeting, 2017

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-211-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Mar 17, 2017 1:30 PM - 4:45 PM 211 (211)

Nobuyuki Matsuki(Kanagawa Univ.), Shinsuke Miyajima(Tokyo Institute of Technology)

2:15 PM - 2:30 PM

△ [17p-211-4] Influence of RF power on the properties of i-a-Si:H passivation layer deposited by facing target sputtering method

〇Yuta Shiratori1, Akira Faris1, Kazuyoshi Nakada1, Shinsuke Miyajima1 (1.Tokyo Tech.)

Keywords:crystallin silicon solar cell, passivation layer, amorphous silicon