[17p-315-1~12] 8.1 Plasma production and control

[17p-315-3] Influence of Impure Nitrogen Gas Concentration on Fundamental Properties and Radial Uniformity in Non-Equilibrium Atmospheric Pressure Helium Glow Discharges

〇Kyohei Komori¹, Oda Akinori¹ (1.Chiba Inst. Technol.)

Keywords:Atmospheric pressure glow discharge, Helium

Non-Equilibrium atmospheric pressure glow discharges have been utilized for materials processing, bio-medical and bio-logical applications. Further understanding of fundamental plasma properties was strongly required in the above applications. In this work, the influence of impure nitrogen gas concentration on fundamental properties in non-equilibrium atmospheric pressure glow discharges was examined using spatially two-dimensional fluid simulation.