[17p-315-1~12] 8.1 Plasma production and control

[17p-315-9] Vapor phase synthesis of iron-endohedral fullerene by using induction heating evaporator in electron cyclotron resonance ion source

〇shogo hagino¹, Takuro Otsuka¹, Takuto Watanabe¹, Yuto Tsuda¹, Takashi Uchida², Masayuki Muramatsu³, Atsushi Kitagawa³, Yoshikazu Yoshida², Yushi Kato¹ (1.Osaka Univ., 2.Toyo Univ., 3.NIRS)

Keywords:ECR ion source, induction heating evaporator, fullerenes