The 64th JSAP Spring Meeting, 2017

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[17p-419-1~10] 6.3 Oxide electronics

Fri. Mar 17, 2017 1:30 PM - 4:00 PM 419 (419)

Kinoshita Kentaro(Tottori Univ.)

1:30 PM - 1:45 PM

[17p-419-1] Synthesis of Zn3N2 films by DC and RF magnetron sputtering

〇Hironori Kamijo1, Junjun Jia1, Shinichi Nakamura1, Yuzo Shigesato1 (1.Aoyama Gakuin Univ.)

Keywords:Thin film