[17p-P1-1~4] 15.2 II-VI and related compounds

[17p-P1-2] Growth of CdS thin films by mist chemical vapor deposition

〇Kazuyuki Uno¹, Yuuka Takimoto¹, Ichiro Tanaka¹ (1.Wakayama University)

Keywords:semiconductor, cadmium sulfide, mist chemical vapor deposition

We successfully grew cadmium sulfide (CdS) by mist chemical vapor deposition using aqueous solutions of cadmium chloride and thiourea. The color of the grown films was yellow and the thickness was 200-500nm. Their crystal structure was wurtzite structure estimated by X-ray diffraction measurements. They were polycrystalline films and the grain sizes were 300-500nm in diameter. The absorption edge was 490nm by optical absorption measurements.