[17p-P2-1~13] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[17p-P2-1] Influence of laser annealing on crystallinity of GaAs thin film on Si substrate

〇(M1)Kenji Kaino¹, Hiroki Yoshidome¹, Koji Maeda¹, Tetsuo Ikari¹, Atsuhiko Fukuyama¹, Hidetoshi Suzuki¹ (1.Miyazaki Univ.)

Keywords:MBE