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Thu. Sep 20, 2018 9:30 AM - 9:45 AM [20a-331-3] Evaluation of low concentration Carbon in GaN by SIMS 〇Kazue Shingu1, Masumi Obuchi1, Richard Hockett2, Larry Wang2 (1.Nano Science, 2.EAG) PDF Download
Wed. Sep 19, 2018 4:30 PM - 4:45 PM [19p-131-11] Measurement of low level carbon in silicon substrate using SIMS 〇Masumi Obuchi1, Kazue Shingu1, Larry Wang2, Peter Zhao2, Man Xu2, Jing Guo2, Hang Dong Lee2,1 (1.NANO SCIENCE, 2.EAG) PDF Download