Peter L.G. Ventzek

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

5:00 PM - 5:30 PM

▲ [20p-223-7] Modeling and simulation perspectives on surface chemistry control in atomic layer processing

〇Peter L.G. Ventzek¹ (1.Tokyo Electron America, Inc.)