Hiroyuki Suzuki

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20a-PA5-1~14] 13.3 Insulator technology

9:30 AM - 11:30 AM

[20a-PA5-4] Low Temperature SiO₂ Atomospheric Pressure Chemical Vaper Deposition using SiH₄/O₃ and its application to oxide-semiconductor TFTs

〇Hiroyuki Suzuki¹, Tomo Ueno², Hiroyuki Uchiyama³, Ikuo Kurachi⁴, Kentaro Yoshioka¹ (1.AMAYA Co.,Ltd, 2.Tokyo University of Agriculture and Technology, 3.Hitachi,Ltd, 4.D&S Inc.)