Takahiro Shindo

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 10:30 AM 141 (141+142)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[19a-141-1~6] 8.1 Plasma production and diagnostics

9:15 AM - 9:30 AM

[19a-141-2] Evaluation on Capacitive Coupling Plasma with Pulsed DC Discharge

〇Takahiro Shindo¹, Yasushi Morita¹, Ayuta Suzuki¹, Tatsuo Matsudo¹ (1.Tokyo Electron Technology Solutions Ltd.)