Yoshinori Karo

→ Search for Yoshinori Karo in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PB (Shirotori Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[20a-PB9-1~14] 6.2 Carbon-based thin films

9:30 AM - 11:30 AM

[20a-PB9-6] Fabrication and structural analysis of high-nitrogen containing a-CN_x:H thin films using radio-frequency plasma CVD of the benzene-N₂-Ar gas mixtur

〇Yoshinori Karo¹, Yoshiki Iizawa¹, Hidetoshi Saitoh¹, Haruhiko Ito¹ (1.Nagaoka Univ.of Tech)