Masumi Obuchi

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 5:45 PM 131 (131+132)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19p-131-1~15] 15.7 Crystal characterization, impurities and crystal defects

4:30 PM - 4:45 PM

[19p-131-11] Measurement of low level carbon in silicon substrate using SIMS

〇Masumi Obuchi¹, Kazue Shingu¹, Larry Wang², Peter Zhao², Man Xu², Jing Guo², Hang Dong Lee^2,1 (1.NANO SCIENCE, 2.EAG)