Nanoka Miyahara

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:45 AM - 10:00 AM

△ [20a-438-4] Sputter Epitaxy of In-rich (ZnO)_x(InN)_1-x Films Directly on Sapphire Substrates

〇Nanoka Miyahara¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Daisuke Nakamura¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu Univ.)