Hideaki Zama

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[19p-PB1-1~37] 6.3 Oxide electronics

1:30 PM - 3:30 PM

[19p-PB1-16] Investigation of Hydrogen-Free SiO₂-PECVD for Functional Metal-Oxide Materials

〇Hideaki Zama¹, Tadamasa Kobayashi¹ (1.ISM, ULVAC,Inc.)