Yuki Miwa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:15 AM - 10:30 AM

△ [20a-438-6] Tribological properties of Si-doped DLC film deposited by dual magnetron sputtering

〇(M2)Yuki Miwa¹, Akinori Oda², Hiroyuki Kousaka³, Takayuki Ohta¹ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)