Tomoaki Oga

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PA (Event Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[18p-PA2-1~20] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

△ [18p-PA2-8] Investigation of room temperature solid-phase crystallization process of β-Ga₂O₃ thin film by ultraviolet excimer lamp / laser irradiation

〇Tomoaki Oga¹, Hiroyuki Morita¹, Yuki Ikeya¹, Nobuo Tsuchimine², Satoru Kaneko^3,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.TOSHIMA Manu., 3.KISTEC)