Yusaku Tanahashi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20a-PA5-1~14] 13.3 Insulator technology

9:30 AM - 11:30 AM

[20a-PA5-5] Characterization of the multiple thin oxide films and interfaces on Si by PEALD

〇Yusaku Tanahashi¹, Shingo Ogawa¹, Keiko Inoue¹, Tomomi Sugimoto¹, Yumiko Shimizu¹, Shino Kosaka¹, Hirofumi Seki¹ (1.Toray Research Center, Inc.)