Shinichi Morohashi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM

[20a-438-3] ITO thin films fabricated by hybrid facing cathode sputtering using rf-dc coupled power supply

〇Shinichi Morohashi¹ (1.Yamaguchi Univ.)