Hirotsugu Sugiura

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:30 AM - 11:45 AM

△ [20a-438-10] Control of sp² carbon bonds in amorphous carbon films by formation of precursor radicals depending on a residence time

〇Hirotsugu Sugiura¹, Yasuyuki Ohashi¹, Lingyun Jia¹, Hiroki Kondo¹, Kenji Ishikawa¹, Takayoshi Tsutsumi¹, Keigo Takeda², Makoto Sekine¹, Masaru Hori³ (1.Nagoya Univ. Eng., 2.Meijo Univ., 3.Nagoya Univ. Inst. of Innovation for Future Society)