Shinji Yamaguchi

→ Search for Shinji Yamaguchi in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20a-PA5-1~14] 13.3 Insulator technology

9:30 AM - 11:30 AM

[20a-PA5-7] Paramagnetic point defects in silicon nitride films annealed at 1050℃(２)

〇(M2)Shinji Yamaguchi¹, Kiyoteru Kobayashi¹ (1.Tokai Univ.)