Tomoko Ito

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

6:30 PM - 6:45 PM

[20p-223-11] Complex-formation reaction analysis for atomic-layer etching of metal surfaces

〇Tomoko Ito¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)