The 79th JSAP Autumn Meeting, 2018

Reo Kometani

Chairperson, etc.

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

  • Symposium (Oral)
  • | Symposium
  • | Advanced ion microscopy for future nanoelectronics materials and devices

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Reo Kometani(Univ. of Tokyo)