[18a-136-1~12] 3.7 レーザープロセシング

[18a-136-5] High-speed and High-precision Femtosecond Laser Processing of Ultra-thin Glass Sheet and Its Applications for Biology

〇Yaxiaer Yalikun^1,2、Yoichiroh Hosokawa¹ (1.Nara Institute of Science and Technology, Graduate School of Materials Science, Bio-Process Engineering Laboratory、2.Laboratory for Integrated Biodevice Quantitative Biology Center, RIKEN)

キーワード：Ultra-thin glass chip, Microfluidic device, Femtosecond laser processing

In this paper, we report a fabrication method of a 100% single cell size (12 µm) ultra-thin and flexible glass fluidic device by using a femtosecond laser for various possible applications. To demonstrate our idea, we first investigated the proper laser power for ultra-thin glass sheet fabrication, and fabricated a porotype of glass fluidic device. Two 1mm inlets and one 10µm (single cell size) ×25mm channel were first fabricated on a 4µm thick ultra-thin glass sheet by a femtosecond laser. Then we sealed the top side with inlet and outlet fabricated glass sheet and sealed the bottom with non-fabricated glass sheet. Finally, a flexible and total thickness is approximately 12µm (single cell size) 100 % glass device was achieved. Furthermore, we demonstrated the basic function of glass chip as a normal fluidic device. 1 µm and 2 µm diameter micro beads that flow through the 10µm channel was successfully observed. This method significantly scaled down the thickness limitation of independent glass fluidic device and opens new opportunities for single cell size device in measurement, stimulation, clinic, biochemical analysis and syntheses field.