[18a-212A-1~8] 3.15 Silicon photonics

[18a-212A-1] Demonstration of a thermo-optic phase shifter on Ge-on-Insulator platform

〇Takumi Fujigaki¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.Univ. of Tokyo)

Keywords:Mid-infrared photonics

We have proposed Ge CMOS platform for Mid-infrared photonics, which is expected for various sensing.In this work, we demonstrate the Ge thermo-optics phase shifter on Ge-on-Insulator (GeOI) substrate. Due to the large thermo-optic coefficient in Ge, we successfully achieve low-power phase modulation efficiency of 8.7 mW for pi phase shift, which is half of that of Si.