Effect of quartz cut angle and SAW propagation direction on characteristics of LLSAWs on ScAlN film/quartz substrate

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Tue. Sep 18, 2018 10:00 AM - 12:00 PM 231B (231-2)

Jun Kondoh(Shizuoka Univ.)

10:00 AM - 10:15 AM

〇Masashi Suzuki¹, Naoya Sawada¹, Shoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:Surface acoustic wave, ScAlN film, Quartz