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[18a-431B-1] Developments of Light-weight Hybrid UHV Pump
Keywords:Vacuum
We built a heating-activated getter element inside the compact and lightweight ion pump of the CF70 standard which can be driven by the battery which we have been developing and evaluated its performance and features as UHV pump. The total length of the prototype hybrid pump is about 260 mm and the weight is about 3.5 kg. When this was mounted in an ultra-high vacuum chamber with a capacity of about 50 liters and a standard start-up procedure was carried out, the ultimate vacuum was about 1 × 10 -8 Pa, and its performance and characteristics were found to be strongly dependent on its activation condition of heating-activated getter element.