[18p-136-1~15] 3.7 Laser processing

△ [18p-136-8] Fabrication of conductive structures by femtosecond-laser-based modification of PDMS

〇Yasutaka Nakajima¹, Nikolay Nedyalkov², Akito Katayama¹, Mitsuhiro Terakawa³ (1.Grad. Sch. Keio Univ., 2.Bulgarian Academy of Sciences, 3.Keio Univ.)

Keywords:Femtosecond laser, Silicon carbide, Polydimethylsiloxane

We experimentally demonstrate direct writing of silicon carbide (SiC) on the surface of native polydimethylsiloxane (PDMS) using a femtosecond laser. Native PDMS was irradiated with focused femtosecond laser pulses. The irradiated surface exhibited electrical conductivity. XRD result shows SiC was formed on the irradiated surface of PDMS. The presented technique is promising for the fabrication of flexible/stretchable devices with SiC microstructures.