The 79th JSAP Autumn Meeting, 2018

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Symposium (Oral)

Symposium » New Process Technology of Nitride Semiconductors

[18p-146-1~8] New Process Technology of Nitride Semiconductors

Tue. Sep 18, 2018 1:30 PM - 6:00 PM 146 (Reception Hall)

Motoaki Iwaya(Meijo Univ.), Yoshinao Kumagai(TUAT)

5:30 PM - 6:00 PM

[18p-146-8] Development of deep UV LED on single crystal AlN as substrate and its application

〇Tomohiro Morishita1 (1.Asahi Kasei Microdevices)

Keywords:Light emitting device, Nitride Semiconductor