[18p-212A-1~14] 3.15 シリコンフォトニクス

▲ [18p-212A-13] Design of Horizontal Slot Waveguides based on Er-doped Rare Earth Oxide on Si

〇Xuejun Xu¹、Wojciech Szuba¹、Tomohiro Inaba¹、Takehiko Tawara^1,2、Hiroo Omi^1,2、Hideki Gotoh¹ (1.NTT Basic Research Labs.、2.NTT Nanophotonics Center)

キーワード：Rare earth oxide, Slot waveguide, Molecular beam epitaxy

Single crystalline Er-doped rare earth oxide (REO), which can be epitaxially grown on Si substrate, has attracted great attention recently for Si-based monolithic-integrated lasers and optical quantum memories in the telecommunication band. To realize these devices, we have proposed and designed a rib-type horizontal slot waveguide structure with high confinement factor up to 63%, as well as highly efficient fiber-to-waveguide grating couplers with coupling efficiency of 44%.