[18p-212A-1~14] 3.15 Silicon photonics

▲ [18p-212A-7] Fabrication of Si racetrack optical modulator with III-V/Si hybrid MOS phase shifter

〇(DC)Qiang Li¹, ChongPei Ho¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.Univ. of Tokyo)

Keywords:Optical modulator, Si photonics, Ring resonator

Si photonics is a promising solution for short-reach optical interconnect to solve the bandwidth bottleneck. Ring or racetrack resonator is a critical component for Si photonic platform owing to its compact footprint and high sensibility. A Si hybrid metal-oxide-semiconductor (MOS) phase shifter is capable of highly efficient, low-loss and low-power optical phase modulation and has been successfully implemented on Mach-Zehnder interferometer (MZI) optical modulator and optical switch. In this work, we have fabricated a Si racetrack resonator with III-V/Si hybrid metal-oxide-semiconductor (MOS) phase shifter. The resonator demonstrated 0.056 Vcm modulation efficiency and 50.8 pW steday-power consumption.