[18p-221B-1~15] 4.6 Terahertz Photonics

▲ [18p-221B-11] Trade-off Study between Cutoff Frequency and Responsivity of SOI CMOS-based Terahertz Antenna-Coupled Bolometers with Different Temperature Sensors: MOSFET, PN-Junction Diode, Resistor and Thermocouple

〇DURGADEVI ELAMARAN¹、TAKEO UETA²、HIROAKI SATOH³、NORIHISA HIROMOTO¹、HIROSHI INOKAWA³ (1.GSST, Shizuoka Univ、2.GSIST, Shizuoka Univ、3.RIE, Shizuoka Univ)

キーワード：Antenna-coupled bolometer, Figure of merit

For bolometers, it is well known that there is a trade-off relationship between cutoff frequency (f_c) determined by the thermal response speed and responsivity (R_v), and therefore it is appropriate to consider the product of f_c and R_v as a figure of merit (FOM) to make a fair comparison among different bolometers. In this study, antenna-coupled bolometers with different temperature sensors, such as MOSFET, pn-junction diode and resistors with various materials (n⁺ and p⁺ single crystalline silicon, n⁺ poly crystalline silicon) and thermocouple with two different combinations (n⁺ and p⁺ single crystalline silicon, n⁺ poly crystalline silicon and p⁺ single crystalline silicon) were fabricated by 0.6 µm SOI CMOS technology under the constraint of 1-THz operation, and compared considering the trade-off relationship.Obtained f_c and R_v of different temperature sensors are summarized in Fig. 2, where constant f_c´R_v lines are drawn and the FOM is improved toward the upper right corner. MOSFET bolometer shows the best FOM due to its high responsivity as a result of its amplification function.