[18p-231A-1~14] 1.5 Instrumentation, measurement and Metrology

[18p-231A-9] Polarization dependence in 3D geometry measurement using 3D laser scanners

〇Chao Zhang¹, Neisei Hayashi¹, Lei Jin¹, Sze Yun Set¹, Shinji Yamashita¹ (1.RCAST Tokyo Univ.)

Keywords:3D geometry measurement, Laser scanner, Polarization

The AMCW LiDAR illuminates 3D objects with amplitude-modulated laser beams and measures the phase shift of the envelopes of the reflected light. High-precision 3D geometry measurement with comparatively long measurement distance can thus be realized. Therefore, the AMCW LiDAR is suited for 3D geometry measurement of industrial inspection. Generally, the surfaces of industrial products are fine-textured. The 3D geometry measurement using such a laser scanner is polarization dependent since scattering characteristics vary with polarization states of the polarized illumination light. In this article, we report the polarization dependence of the 3D geometry measurement using AMCW LiDAR.