[18p-234A-1~3] 8.6 Plasma Electronics English Session

▲ [18p-234A-2] Enhancements of plume characteristics of low power atmospheric pressure Ar plasma with electromagnet

〇(D)JoeyKim Tumbali Soriano¹, Takashi Tori¹, Paolo Edward Tan², Motoi Wada¹ (1.Doshisha Univ., 2.Ateneo De Manila Univ.)

Keywords:atmospheric pressure plasma, RF plasma, magnetic enhancement

In some applications like plasma welding, magnetic field enhances plasma production and stability. In this study, solenoid electromagnet is installed to produce a local magnetic field improving the plume characteristics of low power atmospheric pressure Ar plasma. The current supply used in the electromagnet varied from 50-90 A has magnetic flux density spatial profile. The 2 L/min Ar gas flows inside the quartz tube and it is regulated using a gas flow meter. The Ar plasma develops upon generating current from the 13.56 MHz RF power supply to the 2-mm diameter copper wire wound helically (4 turns) around a 5.7 cm long quartz dielectric tube (5 mm ID, 7 mm OD). Produced plasma emits line radiations of N₂⁺ (356.18 nm) and Ar (763.51 nm). Increase in intensity ratio of N₂⁺ and Ar and total ion density is observed with increasing electromagnet current at position C.